在“工业4.0”时代，微机电系统（MEMS）传感器在技术发展中起着至关重要的作用。其中，MEMS加速度计已成为基础组件，是实现各类智能应用的关键。MEMS加速度计是一种由集成检测质量块组成的微型器件，其输出信号与施加的加速度关联。高灵敏度MEMS加速度计的 ...

钪掺杂氮化铝（AlScN）压电MEMS加速度计因其尺寸紧凑、CMOS兼容性及高温可靠性，在分布式振动监测系统中具有广阔的应用前景。然而，其在弯曲模式下的工作，极易受到交叉轴的干扰，这在实际应用中会严重影响测量精度。 据麦姆斯咨询报道，近期，中国科学 ...

For roughly a decade, MEMS accelerometers have been making automobiles safer by triggering air bags in the event of a crash. But manufacturers of the tiny sensors have always had larger ambitions: a ...

DUBLIN--(BUSINESS WIRE)--Research and Markets has announced the addition of the "mCube MC3672: The smallest WLCSP MEMS Accelerometer for Wearables" report to their offering. With the MC3672, mCube has ...

LONDON — Motion sensing, largely enabled by Micro Electro-Mechanical Systems (MEMS) accelerometers, has taken more than its usual share of the headlines recently. Whilst not a rags to riches tale – ...

New platform combines genetic algorithms with freeform geometry to design resilient, high-performance MEMS accelerometers tolerant to fabrication flaws. (Nanowerk News) Traditionally, ...

No audio available for this content. Photo: Silicon Designs New radiation-tested, tactical-grade MEMS inertial accelerometers designed for spacecraft electronics testing Silicon Designs Inc. has ...

A significant increase in the demand of accelerometers is expected as the market for consumer electronics, such as smartphones, and social infrastructure monitoring applications are expanding. Such ...

Quantifying the vibration of industrial machinery and using that information for condition monitoring (CM) has long been an ambitious goal, but also one with significant technical and implementation ...

No audio available for this content. Integrations of MEMS sensors with signal conditioning and radio communications form “motes” with extremely low-cost and low-power requirements and miniaturized ...

Researchers from Delft University of Technology have announced the development of a novel surface micromachined accelerometer. This innovative device utilizes a silicon carbide-carbon nanotube ...